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學歷 Education |
國立中央大學電機工程研究所博士 |
國立中央大學物理研究所碩士 |
國立中央大學物理系 |
經歷 Work Experience |
國立中興大學副教授(2010/02-present) |
國家奈米元件實驗室研究員(2006/01-2010/01) |
國家奈米元件實驗室組長(2005/09-2010/01) |
逢甲大學副教授(2004/02-2005/07) |
國家奈米元件實驗室副組長(2003/10-2005/08) |
國家奈米元件實驗室副研究員(1999/10-2005/12) |
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表面科學研究 / 掃描探針技術 / 半導體物理 / 電性掃描探針顯微術 / 表面分析技術
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- Chun-Ting Lina, Hung Ji Huanga, Mao-Nan Changb, Po-Li Chena,Chien-Nan Hsiaoa, Ming-Hua Shiaoa and Fan-Gang Tsengc“Plasmonic Catalytic Layer for Visible-Light Enhanced Methanol Oxidation Reaction” ECS Meeting Abstracts, MA2016-02 3675(2016)
- Lin, Chun-Ting; Chang, Mao-Nan; Huang, Hung Ji; Chen, Ching-Hao; Sun, Ru-Jing; Liao, Bo-Huei; Chau, Yuan-Fong Chou; Hsiao, Chien-Nan; Shiao, Ming-Hua; Tseng, Fan-Gang, "Rapid fabrication of three-dimensional gold dendritic nanoforests for visible light-enhanced methanol oxidation”, ELECTROCHIMICA ACTA, 192, 15-21 (2016).
- Fu-Ju Hou, Po-Jung Sung, Fu-Kuo Hsueh, Chien-Ting Wu, Yao-Jen Lee, Mao-Nang Chang, Yiming Li, and Tuo-Hung Hou, "32-nm Multigate Si-nTFET with Microwave-Annealed Abrupt Junction”, IEEE TRANSACTIONS ON ELECTRON DEVICES, 63, 1808 (2016/5).
- Lin, CT; Chang, MN; Huang, HJ; Chen, CH; Sun, RJ; Liao, BH; Chau, YFC; Hsiao, CN; Shiao, MH; Tseng, FG, “Rapid fabrication of three-dimensional gold dendritic nanoforests for visible light-enhanced methanol oxidation”, Electrochimica Acta 192,15–21, (2016)
- Chun-Ting Lin, Yu-Wei Chen, James Su, Chien-Ting Wu, Chien-Nan Hsiao, Ming-Hua Shiao, and Mao-Nan Chang*, “Facile Preparation of a Platinum Silicide Nanoparticle-Modified Tip Apex for Scanning Kelvin Probe Microscopy”, Nanoscale Research Letters, 10, 401 (2015/10).
- Chun-Ting Lin, Ming-Hua Shiao, Mao-Nan Chang, Nancy Chu, Yu-Wei Chen, Yu-Hsuan Peng, Bo-Huei Liao, Hung-Ji Huang, Chien-Nan Hsiao, and Fan-Gang Tseng, “A facile approach to prepare silicon-based Pt-Ag tubular dendritic Nano-forests (tDNFs) for solar-light-enhanced methanol oxidation reaction”, Nanoscale Research Letters, 10, 74 (2015/2).
- Chun-Ting Lin, Ming-Han Yu, James Su, Po-Li Chen, Ming-Hua Shiao, Akos Nemcsics, and Mao-Nan Chang*, “Localized Electroless Ag Plating at a Tip Apex for Scanning Kelvin Probe Microscopy”, Japanese Journal of Applied Physics, 52, 06GF03 (2013/6).
- M. N. Chang, C. W. Hu, T. H. Chou, and Y. J. Lee, “Contrast distortion induced by modulation voltage in scanning capacitance microscopy”, Applied Physics Letters, 101, 083503 (2012/8). (IF: 3.844)
- C.-H. Chen, C.-E. Cheng, C.-C. Hsu, M. N. Chang, H. W. Shiu, and F. S.-S. Chien, “Local interdiffusion at buried TiN/Si interfaces with scanning probes”, Journal of Physics D: Applied Physics 45, 215307 (2012/5). (IF: 2.544)
- Hung-Min Lin, Mao-Nan Chang, Yue-Sheng Lin, and Chao-Chia Cheng, “The Manufacturing of a Metallic Nano-Cluster at a Tip Apex for Field-Sensitive Microscopy Applications”, J. Nanosci. Nanotechnol. 10, 4459 (2010/7). (IF: 1.352)
- W. C. Chien, Y. C. Chen, E. K. Lai, Y. D. Yao, P. Lin, S. F. Horng, J. Gong, T. H. Chou, H. M. Lin, M. N. Chang, Y. H. Shih, K. Y. Hsieh, R. Liu, and Chih-Yuan Lu, “Unipolar Switching Behaviors of RTO WOX RRAM”, IEEE Electron Device Letters 31, 126 (2010/2). (IF: 2.719)
- Yung-Ling Lan, Hung-Cheng Lin, Hsueh-Hsing Liu, Geng-Yen Lee, Fan Ren, Stephen J. Pearton, Mao-Nan Chang, Jen-Inn Chyi, “Low-resistance smooth-surface Ti/Al/Cr/Mo/Au n-type Ohmic contact to AlGaN/GaN heterostructures”, Applied Physics Letters 94, 243502 (2009/6). (IF: 4.096)
- Mao-Nan Chang, Ruo-Syuan Lin, Hsueh-Hsing Liu, Hung-Min Lin, Hung-Cheng Lin, and Jen-Inn Chyi, “Investigations of Photo-assisted Conductive Atomic Force Microscopy on III-Nitrides”, Microelectronics Journal 40, 353 (2009/2). (IF: 0.848)
- G. T. Chen, C. H. Chan, C. H. Hou, H. H. Liu, N. W. Shiu, M. N. Chang, C. C. Chen, J.-I. Chyi, “Epitaxial lateral overgrowth of GaN on AlGaN/(111)Si micropillar array fabricated by microsphere lithography”, Gallium Nitride Materials and Devices III 6894, 89408 (2008).
- C. C. Hsu, R. Q. Hsu, Y. H. Wu, T. W. Chi, C. H. Chiang, J. F. Chen, M. N. Chang, “Analysis of InAsN quantum dots by transmission electron microscopy and photoluminescence”, Ultramicroscopy 108, 1495 (2008). (IF: 2.629)
- M. N. Chang, T. H. Chou, C. Y. Yang, and J. H. Liang, “The factors influencing the stability of scanning capacitance spectroscopy”, Microscopy of Semiconducting Materials 120, 467 (2008).
- Guan-Ting Chen, Shih-Pang Chang, Jen-Inn Chyi, and Mao-Nan Chang, “Growth and characterization of crack-free semipolar InGaN/GaN multiple-quantum-well on v-grooved (001)Si substrates”, Applied Physics Letters 92, 241904 (2008/6). (IF: 4.096)
- Guan-Ting Chen, Jen-Inn Chyi, Chia-Hua Chan, Chia-Hung Hou, Chii-Chang Chen, and Mao-Nan Chang, “Crack-free GaN grown on AlGaN/(111)Si micropillar array fabricated by polystyrene microsphere lithography”, Applied Physics Letters 91, 261910 (2007/12). (IF: 4.068)
- T. C. Cheng, P. Y. Chen, W. J. Huang, K. H. Hsu, H. T. Hsueh, M. N. Chang, and J. S. Wu, “Nanomanipulation Measurement and PIC Simulation of Field-emission Properties from a Single Crystallized Silicon Nano-Emitter”, Nanotechnology 18, 225503 (2007/5). (IF: 3.511)
- M. H. Cheng, T. C. Cheng, W. J. Huang, M. N. Chang, “Influence of oxygen diffusion on residual stress for tantalum thin films”, Journal of Vacuum Science & Technology B 25, 147 (2007/1-2). (IF: 1.548)
- M. N. Chang, C. Y. Chen, M. J. Yang, and C. H. Chien, “Photovoltaic effect on the conductive atomic force microscopic characterization of thin dielectric films”, Applied Physics Letters 89, 133109 (2006/9). (IF: 3.977)
- Jooyoung Lee, Mao-Nan Chang, and Kang L. Wang, “Size dependence of hall mobility and dislocation density in Ge heteroepitaxial layers grown by MBE on a SiO2 patterned Si template”, Microelectronics Journal 37, 1523 (2006/7). (IF: 0.651)
- M. Zhao, W.-X. Ni, P. Townsend, S.A. Lynch, D.J. Paul, C. C. Hsu, and M. N. Chang, “Low-temperature Molecular Beam Epitaxy Growth of Si/SiGe THz Quantum Cascade Structures on Virtual Substrates”, Thin Solid Films 508, 24 (2006/6). (IF: 1.666)
- T. C. Cheng, J. Shieh, W. J. Huang, M. C. Yang, M. H. Cheng, H. M. Lin, and M. N. Chang, “Hydrogen Plasma Dry Etching Method for Field Emission Application”, Applied Physics Letters 88, 263118 (2006/6). (IF: 3.977)
- T. C. Cheng, H. T. Hsueh, W. J. Huang, M. N. Chang, J. S. Wu and S. C. Kung, “ Measurement of field emission properties of a single crystal silicon emitter using scanning electron microscopy”, Microscopy of Semiconducting Materials 107, 351 (2005/10)
- S. D. Wang, M. N. Chang, C. Y. Chen, and T. F. Lei, “Observation of Localized Breakdown Spots in Thin SiO2 films using Scanning Capacitance Microscopy”, Electrochemical and Solid State Letters 8, G233 (2005/9). (IF: 1.970)
- M. N. Chang, C. Y. Chen, W. J. Huang, and T. C. Cheng, “Approach to nonphotoperturbed differential capacitance measurements: A front-wing cantilever”, Applied Physics Letters 87, 023102 (2005/7). (IF: 4.127)
- C. C. Leu, C. H. Chien, C. Y. Chen, M. N. Chang, F. Y. Hsu, C. T. Hu and Y. F. Chen, “Variations of Differential Capacitance in SrBi2Ta2O9 Ferroelectric Films Induced by Photoperturbation”, Applied Physics Letters 86, 092906 (2005/2). (IF: 4.127)
- T. C. Cheng, H. T. Hsueh, W. J. Huang, S. C. Kung, J. S. Wu, and M. N. Chang, “Measurement of Field-Emission Properties of a Single Crystallized Silicon Emitter Using Scanning Electron Microscopy”, Springer Proceedings in Physics, 107, p. 351, (2005/10).
- G. T. Chen, C. C. Pan, C. S. Fang, T. C. Huang, J.-I. Chyi, M. N. Chang, S. B. Huang and J. T. Hsu,”High Reflectivity Pd/Ni/Al/Ti/Au Ohmic Contacts to P-type GaN for Ultraviolet Light-Emitting Diodes”, Applied Physics Letters 85, 2797 (2004/10). (IF: 4.308)
- M. N. Chang, C. Y. Chen, W. W. Wan, and J. H. Liang, “The influence of annealing sequence on p+/n junction observed by scanning capacitance microscopy”, Applied Physics Letters 84, 4705 (2004). (IF: 4.308)
- F. M. Pan, Y. B. Liu, Y. Chang, C. Y. Chen, T. G. Tsai, M. N. Chang, and J. T. Sheu, “Selective growth of carbon nanotube on scanning probe tips by microwave plasma chemical vapor deposition”, Journal of Vacuum Science & Technology B 22, 90 (2004). (IF: 1.664)
- C. C. Leu, C. H. Chien, C. Y. Chen, M. N. Chang, F. Y. Hsu, and C. T. Hu, “Contrast Mechanism of Ferroelectric Domains in Scanning Capacitance Microscopy”, Electrochemical and Solid State Letters 7, A327 (2004). (IF: 2.271)
- M. N. Chang, W. W. Wan, C. Y. Chen, J. H. Lai, J. H. Liang, and F. M. Pan, “Influence of annealing sequence on p+/n junction images studied by scanning capacitance microscopy”, Electrochemical and Solid State Letters 7, G90 (2004). (IF: 2.271)
- M. N. Chang, C. Y. Chen, F. M. Pan, J. H. Lai, W. W. Wan, and J. H. Liang, “Photovoltaic Effect on Differential Capacitance Profiles of Low-Energy-BF2+-Implanted Silicon Wafers”, Applied Physics Letters 82, 3955 (2003). (IF: 4.049)
- C. C. Leu, C. Y. Chen, C. H. Chien, M. N. Chang, F. Y. Hsu, and C. T. Hu, “Domain structure study of SrBi2Ta2O9 ferroelectric thin films by scanning capacitance microscopy”, Applied Physics Letters 82, 3493 (2003). (IF: 4.049)
- M. N. Chang, C. Y. Chen, and F. M. Pan, “Scanning Probe Analysis of Defects Induced by Slight Iron Contamination on Thermally Oxidized p-type Silicon Wafers”, International Journal of Nanoscience 2, 349 (2003).
- M. N. Chang, C. Y. Chen, F. M. Pan, T. Y. Chang, and T. F. Lei, “Observation of Differential Capacitance Images on Slightly Iron-Contaminated p-Type Silicon“, Electrochemical and Solid State Letters 5, G69 (2002). (IF: 2.505)
- C. C. Chuo, M. N. Chang, F. M. Pan, C. M. Lee, and J. –I. Chyi, “Effect of Composition Inhomogeneity on The Photoluminescence of InGaN/GaN Multiple Quantum Wells upon Thermal Annealing“, Applied Physics Letters 80, 1138 (2002). (IF: 4.207)
- M. N. Chang, T. Y. Chang, F. M. Pan, B. W. Wu and T. F. Lei, “An Investigation of Scanning Capacitance Microscopy on Iron-Contaminated p-type Silicon”, Electrochemical and Solid State Letters 4, G69 (2001). (IF: 2.505)
- M. N. Chang, N. -T. Yeh, C. M. Lu, K. C. Hsieh and J. -I. Chyi, “Selective Distribution of Arsenic Precipitates in Low-Temperature Grown III-V Heterostructures”, Applied Physics Letters 75, 52 (1999). (IF: 4.207)
- M. N. Chang, C. C. Chuo, K. C. Hsieh, N. -T. Yeh and J. -I. Chyi, “Role of Excess As in Low-Temperature Grown GaAs Subjected to BCl3 Reactive Ion Etching”, Applied Physics Letters 75, 3032 (1999). (IF: 4.207)
- M. N. Chang, K. C. Hsieh, T. -E. Nee, and J. -I. Chyi, “Effects of Point Defect Distribution on Arsenic Precipitation in Low-Temperature Grown III-V Arsenides”, Journal of Applied Physics 86, 2442 (1999). (IF: 2.281)
- M. N. Chang, K. C. Hsieh, T. -E. Nee, C. C. Chuo, and J.-I. Chyi, “Behavior of Arsenic Precipitation in Low-Temperature Grown III-V Arsenides”, Journal of Crystal Growth 201/202, 212 (1999). (IF: 1.529)
- N. -T. Yeh, T. -E. Nee, P. -W. Shiao, M. N. Chang, J. -I. Chyi, and C. T. Lee, "Photoluminescence Characteristics of Self-Assembled In0.5Ga0.5As Quantum Dots on Vicinal GaAs Substrates", Japanese Journal of Applied Physics 38, 550 (1999). (IF: 1.280)
- M. N. Chang, J. -W. Pan, J. -I. Chyi, K. C. Hsieh, and T. -E. Nee, “Effect of Column III Vacancy on Arsenic Precipitation in Low-Temperature Grown III-V Arsenides”, Applied Physics Letters 72, 587 (1998). (IF: 4.207)
- W. C. Lee, T. M. Hsu, S. C. Wang, M. N. Chang, and J. -I. Chyi, “The Fermi Level of Annealed Low-Temperature GaAs on Si-δ-Doped GaAs Grown by Molecular Beam Epitaxy”, Journal of Applied Physics 83, 486 (1998). (IF: 2.281)
- Y. A. Chen, N. Y. Liang, L. H. Laih, W. C. Tsay, M. N. Chang, J. W. Hong, “Improvement of Electroluminescence Characteristics of Porous Silicon Led by Using Amorphous-Silicon Layers”, Electronics Letters 33, 1489 (1997). (IF: 1.072)
- J. L. Hsieh, M. N. Chang, Y. S. Cheng, and J. -I Chyi, “Defects in Metamorphic InxAl1-xAs (x<0.4) Epilayers Grown on GaAs Substrates”, Journal of Applied Physics 82, 210 (1997). (IF: 2.281)
- Y. A. Chen, N. Y. Liang, L. H. Laih, W. C. Tsay, M. N. Chang, and J. W. Hong, “Improvement of Current Injection of Porous Silicon”, Japanese Journal of Applied Physics 36, 1574 (1997). (IF: 1.280)
- Y. A. Chen, B. F. Chen, W. C. Tsay, L. H. Laih, M. N. Chang, J. -I. Chyi, J. W. Hong, and C. Y. Chang, “Porous Silicon Light-Emitting Diode with Tunable Color”, Solid-State Electronics 41, 757 (1997). (IF: 0.913)
- J. L. Hsieh, M. N. Chang, Y. S. Cheng, and J. -I Chyi, “Defect Study on the Strain-Relaxed InxAl1-xAs Epilayers (x<0.4) Grown on GaAs”, Compound Semiconductors 155, 953 (1997).
- T. M. Hsu, Y. A. Chen, M. N. Chang, N. H. Lu, and W. C. Lee, “Line-Shape of Electromodulation in Uniform Electric-Field of Delta-Doped GaAs”, Journal of Applied Physics 75, 7489 (1994). (IF: 2.281)